MANUALVACUUM BUTTERFLY VALVE
Nominal Diameter:32~400mm
suitable temperature:-29°C~150°C
Gas leakage rate:≤1.3x10-5Pa.L/S
Scope of appication:105~67x10-5Pa
The main materials: Cast steel, stainless steel
MANUAL VACUUM BUTTERFLY VALVE
Precision-Engineered for High-Vacuum Applications in Semiconductor, Aerospace & Research Sectors
Product Overview
The Manual Vacuum Butterfly Valve is a high-performance flow control solution designed for ultra-high vacuum systems requiring minimal leakage and reliable shutoff. With a leak rate ≤1.3×10-5 Pa·L/S (bidirectional) and temperature resistance from -29°C to 150°C, this valve ensures stability in demanding environments. Available in cast steel or 316L stainless steel, it caters to both cost-sensitive and corrosion-resistant applications.
For Engineers & System Designers
Key Technical Features
| Feature |
Details |
| Leak Rate |
≤1.3×10-5 Pa·L/S (He-leak tested) |
| Pressure Range |
105 Pa (Atmospheric) to 6.7×10-5 Pa (UHV) |
| Temperature Rating |
-29°C to 150°C (-20°F to 302°F) |
| Materials |
Body: Cast Steel (WCB) / Stainless Steel (316L) |
| Actuation |
Manual Lever (Lockable in Open/Closed Positions) |
| End Connection |
Flanged (ISO-KF, CF), Threaded (KF-NW) |
Performance Highlights
- Ultra-High Vacuum Compatibility:
- Leak rate meets SEMI S2/S8 standards for semiconductor fabrication.
- All-metal seal option for bakeable systems (up to 150°C).
- Material Versatility:
- 316L stainless steel for corrosion resistance in aggressive processes.
- Cast steel for cost-effective general-purpose vacuum isolation.
- Precision Engineering:
- Low-profile disc reduces turbulence in vacuum chambers.
- Adjustable stem packing for zero-leakage operation.
For Procurement & Facility Managers
Why Choose This Valve?
- Cost Efficiency:
- 30% lower cost than bellows-sealed valves for non-critical UHV applications.
- Maintenance-free design reduces lifecycle expenses.
- Safety:
- Lockable lever prevents accidental operation in hazardous environments.
- CE-marked and RoHS-compliant.
- Customization:
- Surface finishes: Electropolished (316L), epoxy-coated (cast steel).
- Actuation: Pneumatic/electric actuators with position feedback (optional).
For Distributors & OEMs
Commercial Advantages
- Packaging: Bulk orders in vacuum-sealed bags with desiccant.
- Lead Times: 15-20 days for stock sizes; 30 days for custom materials.
- Warranty: 24-month warranty against manufacturing defects.
Marketing Assets
- Images: Cross-sectional views, leak rate test certificates, and application photos.
- Videos: Vacuum chamber integration tutorial, leak detection demonstration.
- Documents: SEMI S2 compliance certificate, material certificates (PDF), and bilingual datasheets.
For End Users (Labs/Factories)
Installation & Maintenance
- Quick Fit: ISO-KF/CF flanges align with standard vacuum components.
- Compact Design: Fits into tight spaces within vacuum chambers.
- Diagnostic Port: Optional pressure gauge connection for real-time monitoring.
Typical Applications
- Semiconductor: Load-lock chambers, CVD/PVD systems.
- Aerospace: Space simulation chambers, satellite testing.
- Research: Cryogenics, particle accelerators, fusion reactors.
- Industrial: Vacuum coating, food packaging, freeze-drying.
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