BRASS FLANGE GLOBE VALVE
NominalDiameter:50~400mm
suitable temperature:-29°C~150°C
Gasleakage rate:≤1.3x10-5
Scope ofappication:KF)2X105~13X10-5 (KF)16X105~13X10-5
The main materials:stainless steel
ELECTRIC VACUUM BUTTERFLY VALVE
Precision-Engineered for Automated High-Vacuum Control in Semiconductor, Aerospace & Industrial R&D
Product Overview
The Electric Vacuum Butterfly Valve combines motorized actuation with ultra-low leakage performance (≤1.3×10-5 Pa·L/S) to deliver reliable flow control in high-vacuum systems. Engineered for -29°C to 150°C operation and compatibility with KF/ISO flanges, this valve is ideal for automated processes in semiconductor fabrication, vacuum coating, and space simulation chambers. Constructed entirely from 316L stainless steel, it resists corrosion in harsh environments while maintaining vacuum integrity.
For Engineers & Automation Specialists
Key Technical Features
Feature |
Details |
Leak Rate |
≤1.3×10-5 Pa·L/S (He-leak tested, bidirectional) |
Pressure Range |
2×105 Pa (Atmospheric) to 1.3×10-4 Pa (HV) |
Temperature Rating |
-29°C to 150°C (-20°F to 302°F) |
Materials |
Body/Disc: 316L Stainless Steel |
Actuation |
Electric Motor (24VDC/220VAC) with Manual Override |
Control |
Modbus RTU, 4-20mA, or 0-10VDC Input |
End Connection |
KF (Quick-Release), ISO (Bolted) |
Performance Highlights
- Automated Precision:
- Proportional control for gradual vacuum adjustment.
- Feedback potentiometer for position monitoring (±1% accuracy).
- High-Vacuum Compatibility:
- All-metal seal option for bakeable systems (up to 150°C).
- Electropolished internals (Ra ≤ 0.4μm) minimize outgassing.
- Durability:
- 316L stainless steel resists corrosion in acidic/alkaline processes.
- IP66-rated enclosure for washdown environments.
For Procurement & Facility Managers
Why Choose This Valve?
- Cost Efficiency:
- 40% lower cost than bellows-sealed valves for HV/UHV applications.
- Energy-efficient motor reduces operational expenses.
- Safety:
- Emergency stop (E-Stop) compatible.
- CE, ATEX Zone 2, and SEMI S2-compliant.
- Customization:
- Explosion-proof housing (Ex d IIC T6) for hazardous areas.
- Food-grade seals (FDA-approved) for pharmaceutical use.
For Distributors & System Integrators
Commercial Advantages
- Packaging: Vacuum-sealed in anti-static bags with desiccant.
- Lead Times: 15-20 days for stock configurations; 45 days for custom actuators.
- Warranty: 36-month warranty with optional extension.
Marketing Assets
- Images: 3D CAD models, leak rate test certificates, and application photos.
- Videos: Automated control demo, integration with PLC systems.
- Documents: SEMI S2 compliance certificate, ATEX certification, and bilingual datasheets.
For End Users (Factories/Labs)
Installation & Maintenance
- Plug-and-Play: Pre-wired with M12 connector for quick integration.
- Compact Design: Fits into tight spaces within vacuum chambers.
- Diagnostic Port: RS-485 interface for predictive maintenance.
Typical Applications
- Semiconductor: Etch chambers, ion implanters, load-lock systems.
- Aerospace: Space simulation chambers, satellite testing.
- Research: Fusion reactors, synchrotron beamlines, cryogenic systems.
- Industrial: Vacuum coating, food packaging, freeze-drying.







