PNEUMATIC VACUUM BUTTERFLY VALVE
NominalDiameter:50-600mm
suitable temperature:-29°C~150°C
Gas leakage rate:≤1.3x10-6
scope ofappication:2X105~1.3X10-5The main materials:stainless steel
Pneumatic Vacuum Butterfly Valve
Engineered for High-Speed, High-Purity Vacuum Control in Semiconductor, Aerospace, and Advanced Research
Product Overview
The Pneumatic Vacuum Butterfly Valve integrates pneumatic actuation with ultra-low leakage technology, delivering rapid response and remote control for vacuum systems requiring precision and reliability. With a bidirectional leak rate ≤1.3×10 Pa·L/S and operational temperature range of -29°C to 150°C, this valve is ideal for automated processes in semiconductor manufacturing, vacuum coating, and space simulation chambers. Constructed from 316L stainless steel with electropolished internals (Ra ≤ 0.4μm), it ensures corrosion resistance and minimal particle generation, meeting stringent cleanliness standards.
Key Features
1. High-Speed Actuation & Precision Control
- Pneumatic Drive: Completes open/close cycles in 0.3 seconds; supports proportional control via 4-20mA/0-10VDC signals.
- Feedback System: High-resolution position sensor (±0.1% accuracy) for real-time valve angle monitoring.
2. Ultra-High Vacuum Performance
- Leak Rate: Helium-leak tested to ≤1.3×10 Pa·L/S, compliant with Ultra-High Vacuum (UHV) standards.
- Pressure Range: Covers atmospheric pressure (2×10 Pa) to high vacuum (1.3×10 Pa), adaptable to multi-stage pump systems.
3. Corrosion Resistance & Cleanliness
- 316L Stainless Steel Body: Electropolished to SEMI F57 standards, reducing particle adhesion.
- Seal Options: fluoroelastomer (standard), FFKM perfluoroelastomer (chemical-resistant), or metal seals (bakeable to 300°C).
4. Industrial Reliability
- Pneumatic Actuator: IP66-rated, ATEX-certified (Ex d IIC T6) for hazardous environments.
- Longevity: Self-lubricating bearings ensure oil-free operation exceeding 1 million cycles; maintenance intervals up to 2 years.
Technical Specifications
| Parameter |
Value |
| Nominal Diameter (DN) |
50-600mm (compatible with DN50 to DN600 pipelines) |
| Temperature Range |
-29°C to 150°C (optional heating jacket for extreme temperatures) |
| Leak Rate |
≤1.3×10 Pa·L/S (helium-leak tested) |
| Pressure Range |
2×10 Pa to 1.3×10 Pa |
| Body Material |
316L Stainless Steel (Hastelloy® C-276 optional) |
| Seal Material |
FFKM/Metal |
| Actuator Type |
Pneumatic double-acting/spring-return (ATEX-certified optional) |
| Control Signal |
4-20mA/0-10VDC/Modbus RTU |
| Flange Standard |
KF/ISO quick-release (CF flange optional) |
Typical Applications
- Semiconductor Manufacturing
- Etching/deposition chamber isolation
- Wafer transfer vacuum locks
- Residual gas analyzer (RGA) front-end control
- Aerospace Testing
- Satellite thermal vacuum chambers
- Rocket engine thrust vector control
- Space simulation environmental chambers
- Research & Industrial
- Synchrotron beamline control
- Nuclear fusion device vacuum isolation
- Food vacuum packaging lines
Customization Options
- Special Coatings: DLC (Diamond-Like Carbon) coating for 10x wear resistance.
- Cleanroom Certification: ISO 14644-1 Class 1 compatible packaging.
- Quick-Change Disc: Reduces maintenance time to 15 minutes.
- Fail-Safe Mode: Pre-configured safety position (fully open/closed) during power/air loss.
Service & Support
- Warranty: 36 months (5 years for pneumatic actuator).
- Lead Time: 15 business days for standard models; 30 business days for custom configurations.
- Certifications: CE, ATEX, SEMI S2/S8, ISO 9001.
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