HIGH VACUUM(PRESSURE)BALL VALVE
NominalDiameter:16~150mm
Suitable temperature:-29°C~150°C
Gas leakage rate:≤1.3X10-6
scope of appication: (KF)2X105~13X10-5 (KF)16X105~13X10-5
The main materials: stainless steel
High Vacuum (Pressure) Ball Valve
Engineered for Ultra-Clean, High-Performance Vacuum Isolation in Semiconductor, Aerospace, and Research Applications
Product Overview
The High Vacuum (Pressure) Ball Valve delivers exceptional sealing performance in ultra-high vacuum (UHV) and high-pressure environments, with a leak rate ≤1.3×10 Pa·L/S and operational temperature range of -29°C to 150°C. Constructed from 316L stainless steel with a precision-machined ball and seat, this valve ensures bubble-tight shutoff for critical processes in semiconductor fabrication, vacuum coating, and space simulation chambers. Its compact design and compatibility with KF/ISO flanges make it ideal for compact vacuum systems.
Key Features
1. Ultra-High Vacuum Performance
- Leak Rate: Helium-leak tested to ≤1.3×10 -6Pa·L/S, meeting UHV standards.
- Pressure Range: Operates from atmospheric pressure (2×10-5 Pa) to high vacuum (1.3×10-5 Pa).
2. Robust Construction
- 316L Stainless Steel Body: Electropolished to Ra ≤ 0.4μm, minimizing particle generation and adhesion.
- Precision Ball & Seat: Tungsten carbide coating for wear resistance and low friction.
3. Temperature Resistance
- Wide Range: -29°C to 150°C (optional heating jacket for extreme temperatures).
- Thermal Cycling: Withstands rapid temperature fluctuations without leakage.
4. Flexible Connectivity
- Flange Options: KF (quick-release), ISO (bolted), and CF (ultra-high vacuum) flanges.
- Compact Design: Short face-to-face dimension for space-constrained systems.
Technical Specifications
| Parameter |
Value |
| Nominal Diameter (DN) |
16-150mm (compatible with DN16 to DN150 pipelines) |
| Temperature Range |
-29°C to 150°C (optional -40°C to 200°C) |
| Leak Rate |
≤1.3×10 -6Pa·L/S (helium-leak tested) |
| Pressure Range |
2×105 Pa to 1.3×10-5 Pa |
| Body Material |
316L Stainless Steel (Hastelloy® C-276 optional) |
| Seat Material |
PEEK/Tungsten Carbide |
| Actuation |
Manual lever, pneumatic, or electric actuator |
| Flange Standard |
KF/ISO/CF |
Typical Applications
- Semiconductor Manufacturing
- Vacuum chamber isolation
- Gas delivery systems
- Load-lock chamber venting
- Aerospace Testing
- Satellite thermal vacuum chambers
- Rocket engine component testing
- Space simulation environmental chambers
- Research & Industrial
- Surface science analyzers
- Particle accelerators
- Food vacuum drying
Customization Options
- Special Coatings: DLC (Diamond-Like Carbon) coating for 10x wear resistance.
- Cleanroom Certification: ISO 14644-1 Class 1 compatible packaging.
- Actuator Integration: Pneumatic/electric actuators with position feedback.
- Emergency Handling: Fail-safe mode (fully open/closed during power/air loss).
Service & Support
- Warranty: 36 months (5 years for stainless steel components).
- Lead Time: 15 business days for standard models; 30 business days for custom configurations.
- Certifications: CE, ATEX, SEMI S2/S8, ISO 9001.
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